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[Analysis Case] Diffusion Evaluation of Ga and Al in Si Substrate using SSDP-SIMS

[Analysis Case] Diffusion Evaluation of Ga and Al in Si Substrate using SSDP-SIMS

Measurement avoiding the influence of high concentration layers using SSDP-SIMS.

From the perspective of cost reduction, the use of high-resistance Si substrates for power devices made of GaN is expected. However, it is said that if Al and Ga diffuse to the surface of the Si substrate during high-temperature film formation, a low-resistance layer is formed, leading to leakage. Therefore, we will introduce a case where SIMS analysis was conducted to evaluate the presence or absence of Al and Ga diffusion into the Si substrate. To accurately assess trace diffusion, measurements were conducted from the Si substrate side towards the GaN layer.

  • Contract Analysis

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[Analysis Case] Evaluation of Gate Oxide Film on SiC Substrate

[Analysis Case] Evaluation of Gate Oxide Film on SiC Substrate

Evaluate film thickness, density, and bonding state.

SiC power devices are expected to reduce power loss and handle large power in a compact form as power conversion elements. We will introduce a case where the thickness and density of the gate oxide film, necessary for improving the characteristics of the device, were evaluated using XRR (X-ray reflectivity) and the bonding state was assessed using XPS (X-ray photoelectron spectroscopy).

  • Contract Analysis

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[Analysis Case] Evaluation Case of Hydrogen Injection Sample using SRA/SIMS

[Analysis Case] Evaluation Case of Hydrogen Injection Sample using SRA/SIMS

Introduction to Case Studies on Carrier Concentration Analysis in Lifetime Control Samples

In power semiconductor devices, crystal defects may be formed within the Si substrate for lifetime control. This presents a case study evaluating the carrier concentration distribution due to differences in thermal treatment conditions of hydrogen ions, one of the elements used to create the lifetime control region.

  • Contract Analysis

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[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes

[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes

Distribution of resistance values in the electrode cross-section, visualization of conduction paths, and comparison with ion distribution.

The charge and discharge characteristics of lithium-ion secondary batteries are influenced by electronic conductivity. I will introduce a case where the decreased conductivity of active materials, due to degradation or blockage of conduction paths, was visualized as a resistance value distribution using SSRM. By comparing the results obtained from SSRM with the elemental distribution of Li and other elements measured by TOF-SIMS, it is possible to confirm the correlation between resistance values and elemental distribution. Additionally, it is feasible to classify conductive additives and binders based on resistance values, perform statistical processing, and quantify the mixing degree for each material.

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  • Contract Analysis
  • Contract measurement

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Analysis proposals that can solve problems.

Analysis proposals that can solve problems.

Proposal of analytical methods tailored to the purpose! We will also provide recommendations for improvements after analysis and data interpretation.

We will report analytical results that will definitely lead to problem-solving based on the analysis results. In the case of coating layer analysis, we select analytical methods according to the sample and purpose, correlate surface structure and composition with physical properties, clarify the causes of issues, and propose improvement measures such as material changes or modifications to processing conditions. Please feel free to consult us when needed. 【Examples of Evaluation Targets】 ■ Coating layers, coating liquids ■ Surface treatment layers (flat plates, powders) ・ Hydrophilic/Hydrophobic/Oleophilic/Oleophobic ・ Dirt resistance/Adhesion ・ Silane coupling agent treatment * For more details, please refer to the PDF document or feel free to contact us.

  • Company：KRI
  • Price：Other
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